Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984345 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Sohee Han | 2024-05-14 |
| 11651990 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Hunyong Park, Sohee Han | 2023-05-16 |
| 11462410 | Semiconductor manufacturing apparatus including a beam shaper for shaping a laser beam | Euijin Seo, Jonghwi Seo, Jaehee Lee, Ilyoung Han, Guesuk Lee | 2022-10-04 |
| 11430679 | Semiconductor manufacturing apparatus | Kwangnam Kim, Sungyeon KIM, Hyungjun Kim, Haejoong Park, Jongwoo Sun +3 more | 2022-08-30 |
| 10923452 | Substrate bonding apparatus | Ilyoung Han, Taeyeong Kim, Jihoon Kang, Seokho Kim, Hoechul Kim +2 more | 2021-02-16 |