Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984345 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Sohee Han, Nohsung Kwak | 2024-05-14 |
| 11651990 | Substrate processing apparatus and driving method thereof | Ilyoung Han, Sohee Han, Nohsung Kwak | 2023-05-16 |