Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211672 | Apparatus and method for plasma etching | Jongwoo Sun, Kyohyeok Kim, Taehwa Kim, Jewoo Han | 2025-01-28 |
| 11984304 | Apparatus and method for plasma etching | Jongwoo Sun, Kyohyeok Kim, Taehwa Kim, Jewoo Han | 2024-05-14 |
| 11430679 | Semiconductor manufacturing apparatus | Kwangnam Kim, Nohsung Kwak, Sungyeon KIM, Hyungjun Kim, Jongwoo Sun +3 more | 2022-08-30 |
| 9912258 | Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same | Hongmyoung Kim, Kye Hyun Baek, Sangkyu PARK | 2018-03-06 |
| 9870900 | Methods and systems for managing semiconductor manufacturing equipment | Kye Hyun Baek, Ohyung Kwon, Junghyun Cho | 2018-01-16 |