Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217984 | Wafer processing apparatus including EFEM and method of processing wafer | Jinhyuk Choi, Myungki Song, Kongwoo Lee, Kyusang Lee, Beomsoo Hwang +1 more | 2025-02-04 |
| 11804393 | Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same | Jinhyuk Choi, Kongwoo Lee, Beomsoo Hwang | 2023-10-31 |
| 11462410 | Semiconductor manufacturing apparatus including a beam shaper for shaping a laser beam | Nohsung Kwak, Euijin Seo, Jaehee Lee, Ilyoung Han, Guesuk Lee | 2022-10-04 |