| 12412768 |
Semiconductor substrate processing apparatus |
Jinhyuk Choi, Kongwoo Lee, Myungki Song, Duckjin Kim, Kyusang Lee +1 more |
2025-09-09 |
| 12264747 |
Loadlock apparatus and substrate processing apparatus including the same |
Jinhyuk Choi, Kongwoo Lee |
2025-04-01 |
| 12224191 |
Wafer transfer apparatus with aligner |
Kongwoo Lee, Myungki Song, Kyusang Lee, Seojoo Choi, Jinhyuk Choi |
2025-02-11 |
| 12214491 |
Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same |
Kyeongsup Byeon, Inwook KOO, Dongwon Kim, Minyoung KIM, Yi Jin +4 more |
2025-02-04 |
| 12217984 |
Wafer processing apparatus including EFEM and method of processing wafer |
Jinhyuk Choi, Myungki Song, Kongwoo Lee, Kyusang Lee, Keonwoo KIM +1 more |
2025-02-04 |
| 11920689 |
Loose type pneumatic valve and loose type pneumatic valve module including the same |
Jongkyu Kim, Kwangjun Kim |
2024-03-05 |
| 11846391 |
Gas supply apparatus |
Jongkyu Kim, Hyunsik Kim, Kyeongsup Byeon, Byungjun AN, Byeongchan Jeong +2 more |
2023-12-19 |
| 11804393 |
Wafer processing apparatus including equipment front end module (EFEM) and wafer processing method using the same |
Jinhyuk Choi, Jonghwi Seo, Kongwoo Lee |
2023-10-31 |
