Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996270 | Wafer processing apparatus | Eunhee Jeang, Seongkeun Cho, Kyungrim KIM, Jangwon Cho | 2024-05-28 |
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Masayuki Tomoyasu, Hongmin Yoon, Jihyun Lim | 2023-11-14 |
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Jongwoo Sun, Hongmin Yoon, Jihyun Lim, Masayuki Tomoyasu, Jewoo Han | 2022-09-20 |