Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817298 | Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the same | Incheol Song, Masayuki Tomoyasu, Jihyun Lim | 2023-11-14 |
| 11573468 | Display substrate including a multi-layer structure of an organic layer and an inorganic layer, display device having the same, and method of manufacturing the display substrate | Seungbo Shim, Dasom Kang | 2023-02-07 |
| 11450545 | Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the same | Jongwoo Sun, Incheol Song, Jihyun Lim, Masayuki Tomoyasu, Jewoo Han | 2022-09-20 |
| 10488717 | Display apparatus, method for manufacturing the same, and multi display apparatus | KWIHYUN KIM, Jongjae Lee, Junghwan Hwang, JONGDO KEUM, Yoonsik Park | 2019-11-26 |
| 10012872 | Display device | Seungkyu Lee, Wan NAMGUNG, Hojun Lee | 2018-07-03 |