Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170233 | Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method | Meehyun Lim, Sung Yeol Kim, Sunghyup Kim, Hyung-Jung Yong | 2024-12-17 |
| 12119210 | Fastening automation apparatus for upper electrode | Joohee Kim, Hyunjung Lee, Sungwook Jung, Sunho Kim, Sungjin Kim +1 more | 2024-10-15 |
| 12020909 | Plasma processing apparatus and plasma processing method | Jang-Yeob Lee, Sungyeol Kim, Jinyeong Yun, Minsung Kim | 2024-06-25 |
| 11720027 | Apparatus for generating extreme ultraviolet light and lithography apparatus including the same | Injae Lee, Ohkug Kwon, Sunghyup Kim, Yongchan Kim, Ouiserg Kim +4 more | 2023-08-08 |
| 11646179 | Plasma processing apparatus and plasma processing method | Jang-Yeob Lee, Sungyeol Kim, Jinyeong Yun, Minsung Kim | 2023-05-09 |