Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298676 | Substrate processing apparatus | Injae Lee, Sungyong Bae, Daegeun YOON, Inho Choi, Sunghyup Kim +6 more | 2025-05-13 |
| 11415891 | Extreme ultraviolet light source system | Sunghyup Kim, Myeongjun Gil, Injae Lee | 2022-08-16 |
| 11304287 | Extreme ultraviolet light source systems | Sunghyup Kim, Myeongjun Gil, Sanghoon Lee, Injae Lee | 2022-04-12 |