Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Seung Bo Shim, Ha Dong JIN, Min Hur, Kyo-Hyeok Kim, Jong-Woo Sun +1 more | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Seung Bo Shim, Ha Dong JIN, Min Hur, Kyo-Hyeok Kim, Jong-Woo Sun +1 more | 2022-03-22 |