Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Jong-Woo Sun, Sang Rok Oh +3 more | 2022-11-15 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Jong-Woo Sun, Sang Rok Oh +3 more | 2021-04-06 |
| 7869185 | Method of de-chucking wafer using direct voltage and alternating voltage, and apparatus for fabricating semiconductor device using the same | Dong Jun Shin | 2011-01-11 |