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Samsung: 1 patents #49,284 of 75,807Top 70%
Overall (All Time): #2,809,981 of 4,157,543Top 70%
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Patent #TitleCo-InventorsDate
10748749 Plasma monitoring apparatus, and plasma processing apparatus including the same Jeong-Il Mun, Kyeong-Hun KIM, Hyung Joo Lee, Jong-Woo Sun 2020-08-18