Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Jeong-Il Mun, Kyeong-Hun KIM, Hyung Joo Lee, Jong-Woo Sun | 2020-08-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748749 | Plasma monitoring apparatus, and plasma processing apparatus including the same | Jeong-Il Mun, Kyeong-Hun KIM, Hyung Joo Lee, Jong-Woo Sun | 2020-08-18 |