Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075088 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Dougyong Sung, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |
| 11075089 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Dougyong Sung, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |
| 10622217 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Dougyong Sung, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2020-04-14 |
| 9721762 | Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment | Kyounghoon Han, Byungbok Kang, Tae Hwa Kim, Junghyun Cho, Jae Hyun Lee | 2017-08-01 |
| 9378931 | Pulse plasma apparatus and drive method thereof | Ohyung Kwon, Doug Yong Sung, Jung-Hyun Cho | 2016-06-28 |