Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020903 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Donghyeon Na, Dougyong Sung +3 more | 2024-06-25 |
| 11658039 | Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method | Kyuho Kim, Nam-Kyun Kim, Sungjun Ann, Dougyong Sung, Seungbo Shim | 2023-05-23 |
| 11545341 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Hyeongmo Kang, Donghyeon Na, Dougyong Sung +3 more | 2023-01-03 |
| 11398397 | Electrostatic chuck and plasma processing apparatus including the same | YongWoo Lee, Youngjin Noh, Minyoung Hur, Seungbo Shim, Jaehak Lee | 2022-07-26 |
| 11075088 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Dougyong Sung, Seungbo Shim, Junghyun Cho | 2021-07-27 |
| 11075089 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Dougyong Sung, Seungbo Shim, Junghyun Cho | 2021-07-27 |
| 10622217 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Namjun Kang, Dougyong Sung, Seungbo Shim, Junghyun Cho | 2020-04-14 |