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Home › Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same

US Patent 8000082 · Granted Aug 16, 2011

Estimated economic value: $5,000,000 ⓘ

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