Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8674255 | Apparatus and method for controlling etch uniformity | Eric H. Lenz, Raj Dhindsa, Lumin Li | 2014-03-18 |
| 8299390 | Apparatus and method for controlling plasma density profile | Rajinder Dhindsa, Felix Kozakevich, Lumin Li | 2012-10-30 |
| 7683289 | Apparatus and method for controlling plasma density profile | Rajinder Dhindsa, Felix Kozakevich, Lumin Li | 2010-03-23 |
| 7405521 | Multiple frequency plasma processor method and apparatus | Raj Dhindsa, S. M. Reza Sadjadi, Felix Kozakevich, Lumin Li, Eric H. Lenz +5 more | 2008-07-29 |
| 7276135 | Vacuum plasma processor including control in response to DC bias voltage | Rajinder Dhindsa, Felix Kozakevich | 2007-10-02 |
| 6744212 | Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions | Andreas Fischer, Bill Kennedy, Peter Loewenhardt | 2004-06-01 |