MK

Mike Kellogg

Lam Research: 4 patents #662 of 2,128Top 35%
Overall (All Time): #1,124,332 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11594400 Multi zone gas injection upper electrode system Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more 2023-02-28
10622195 Multi zone gas injection upper electrode system Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Lumin Li, Sang Ki Nam +6 more 2020-04-14
9508530 Plasma processing chamber with flexible symmetric RF return strap Rajinder Dhindsa 2016-11-29
9263240 Dual zone temperature control of upper electrodes Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam +5 more 2016-02-16