Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532460 | Gas mixer | Iqbal Shareef | 2022-12-20 |
| 10943769 | Gas distributor and flow verifier | Iqbal Shareef | 2021-03-09 |
| 10431431 | Gas supply delivery arrangement including a gas splitter for tunable gas flow control | Iqbal Shareef, Anthony Zemlock, Ryan Bise, Nathan Kugland | 2019-10-01 |
| 10128087 | Configuration independent gas delivery system | Iqbal Shareef | 2018-11-13 |
| 10022689 | Fluid mixing hub for semiconductor processing tool | Iqbal Shareef | 2018-07-17 |
| 10002747 | Methods and apparatus for supplying process gas in a plasma processing system | Iqbal Shareef, Evangelos Spyropoulos | 2018-06-19 |
| 9721763 | Systems and methods for providing gases to a process chamber | Iqbal Shareef, Evangelos Spyropoulos | 2017-08-01 |
| 9704761 | Corrosion sensor retainer assembly apparatus and method for detecting corrosion | Iqbal Shareef, Anthony Zemlock | 2017-07-11 |
| 9335768 | Cluster mass flow devices and multi-line mass flow devices incorporating the same | Iqbal Shareef | 2016-05-10 |
| 9175808 | System and method for decreasing scrubber exhaust from gas delivery panels | Iqbal Shareef | 2015-11-03 |
| 9090972 | Gas supply systems for substrate processing chambers and methods therefor | Iqbal Shareef, Evangelos Spyropoulos | 2015-07-28 |
| 9091397 | Shared gas panels in plasma processing chambers employing multi-zone gas feeds | Iqbal Shareef, Piyush Agarwal, Evangelos Spyropoulos | 2015-07-28 |
| 8851113 | Shared gas panels in plasma processing systems | Iqbal Shareef | 2014-10-07 |
| 8794267 | Gas transport delay resolution for short etch recipes | Iqbal Shareef, Tony Zemlock | 2014-08-05 |
| 8720478 | Optimized activation prevention mechanism for a gas delivery system | — | 2014-05-13 |
| 8322380 | Universal fluid flow adaptor | — | 2012-12-04 |
| 8202393 | Alternate gas delivery and evacuation system for plasma processing apparatuses | Harry Wong, Vernon Wong, Christopher Charles Griffin | 2012-06-19 |
| 8122910 | Flexible manifold for integrated gas system gas panels | — | 2012-02-28 |
| 8104503 | Optimized activation prevention mechanism for a gas delivery system and methods therefor | — | 2012-01-31 |
| 7806143 | Flexible manifold for integrated gas system gas panels | — | 2010-10-05 |
| 7784496 | Triple valve inlet assembly | — | 2010-08-31 |
| 7628168 | Optimized activation prevention assembly for a gas delivery system and methods therefor | — | 2009-12-08 |