| 11532460 |
Gas mixer |
Iqbal Shareef |
2022-12-20 |
| 10943769 |
Gas distributor and flow verifier |
Iqbal Shareef |
2021-03-09 |
| 10431431 |
Gas supply delivery arrangement including a gas splitter for tunable gas flow control |
Iqbal Shareef, Anthony Zemlock, Ryan Bise, Nathan Kugland |
2019-10-01 |
| 10128087 |
Configuration independent gas delivery system |
Iqbal Shareef |
2018-11-13 |
| 10022689 |
Fluid mixing hub for semiconductor processing tool |
Iqbal Shareef |
2018-07-17 |
| 10002747 |
Methods and apparatus for supplying process gas in a plasma processing system |
Iqbal Shareef, Evangelos Spyropoulos |
2018-06-19 |
| 9721763 |
Systems and methods for providing gases to a process chamber |
Iqbal Shareef, Evangelos Spyropoulos |
2017-08-01 |
| 9704761 |
Corrosion sensor retainer assembly apparatus and method for detecting corrosion |
Iqbal Shareef, Anthony Zemlock |
2017-07-11 |
| 9335768 |
Cluster mass flow devices and multi-line mass flow devices incorporating the same |
Iqbal Shareef |
2016-05-10 |
| 9175808 |
System and method for decreasing scrubber exhaust from gas delivery panels |
Iqbal Shareef |
2015-11-03 |
| 9090972 |
Gas supply systems for substrate processing chambers and methods therefor |
Iqbal Shareef, Evangelos Spyropoulos |
2015-07-28 |
| 9091397 |
Shared gas panels in plasma processing chambers employing multi-zone gas feeds |
Iqbal Shareef, Piyush Agarwal, Evangelos Spyropoulos |
2015-07-28 |
| 8851113 |
Shared gas panels in plasma processing systems |
Iqbal Shareef |
2014-10-07 |
| 8794267 |
Gas transport delay resolution for short etch recipes |
Iqbal Shareef, Tony Zemlock |
2014-08-05 |
| 8720478 |
Optimized activation prevention mechanism for a gas delivery system |
— |
2014-05-13 |
| 8322380 |
Universal fluid flow adaptor |
— |
2012-12-04 |
| 8202393 |
Alternate gas delivery and evacuation system for plasma processing apparatuses |
Harry Wong, Vernon Wong, Christopher Charles Griffin |
2012-06-19 |
| 8122910 |
Flexible manifold for integrated gas system gas panels |
— |
2012-02-28 |
| 8104503 |
Optimized activation prevention mechanism for a gas delivery system and methods therefor |
— |
2012-01-31 |
| 7806143 |
Flexible manifold for integrated gas system gas panels |
— |
2010-10-05 |
| 7784496 |
Triple valve inlet assembly |
— |
2010-08-31 |
| 7628168 |
Optimized activation prevention assembly for a gas delivery system and methods therefor |
— |
2009-12-08 |
