Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optimized activation prevention assembly for a gas delivery system and methods therefor

Optimized activation prevention assembly for a gas delivery system and methods therefor

US Patent 7628168 · Granted Dec 8, 2009

Estimated economic value: $15,691,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Gas mixer2022
Gas distributor and flow verifier2021
Gas supply delivery arrangement including a gas splitter for tunable gas flow co2019
Configuration independent gas delivery system2018
Fluid mixing hub for semiconductor processing tool2018
Methods and apparatus for supplying process gas in a plasma processing system2018
Systems and methods for providing gases to a process chamber2017
Corrosion sensor retainer assembly apparatus and method for detecting corrosion2017
Cluster mass flow devices and multi-line mass flow devices incorporating the sam2016
System and method for decreasing scrubber exhaust from gas delivery panels2015
Gas supply systems for substrate processing chambers and methods therefor2015
Shared gas panels in plasma processing chambers employing multi-zone gas feeds2015