Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957561 | Gas delivery system | John Drewery, Yoshie Kimura, James H. Adams, Yoko Yamaguchi Adams | 2021-03-23 |
| 8794267 | Gas transport delay resolution for short etch recipes | Iqbal Shareef, Mark Taskar | 2014-08-05 |