Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721566 | Sensor assembly and methods of vapor monitoring in process chambers | Xiaozhou Che, Graeme Scott, Alan Ouye, Nelson Yee | 2023-08-08 |
| 7432209 | Plasma dielectric etch process including in-situ backside polymer removal for low-dielectric constant material | Gerardo Delgadino, Douglas A. Buchberger, Jr. | 2008-10-07 |