| 12143087 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations |
Sunil Kapoor, Yaswanth Rangineni, Edward Augustyniak |
2024-11-12 |
| 11823928 |
Control of wafer bow in multiple stations |
Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama |
2023-11-21 |
| 11258421 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations |
Sunil Kapoor, Yaswanth Rangineni, Edward Augustyniak |
2022-02-22 |
| 11183406 |
Control of wafer bow in multiple stations |
Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama |
2021-11-23 |
| 10622962 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations |
Sunil Kapoor, Yaswanth Rangineni, Edward Augustyniak |
2020-04-14 |
| 10553465 |
Control of water bow in multiple stations |
Edward Augustyniak, David French, Sunil Kapoor, Yukinori Sakiyama |
2020-02-04 |
| 10187032 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations |
Sunil Kapoor, Yaswanth Rangineni, Edward Augustyniak |
2019-01-22 |
| 9918376 |
Hybrid impedance matching for inductively coupled plasma system |
Panya Wongsenakhum, Francisco Juarez |
2018-03-13 |
| 9082589 |
Hybrid impedance matching for inductively coupled plasma system |
Panya Wongsenakhum, Francisco Juarez |
2015-07-14 |
| 9044128 |
Edge cleaning vacuum sweeper system |
— |
2015-06-02 |
| 8847184 |
Composite film for board level EMI shielding |
Chih-Min Cheng, Bo Xia |
2014-09-30 |
| 7042311 |
RF delivery configuration in a plasma processing system |
Stephen E. Hilliker, Anthony Sebastian, Yan Rubin |
2006-05-09 |
| 6753689 |
RF configuration in a plasma processing system |
— |
2004-06-22 |
| 6036390 |
Apparatus for cleaning glass having a plurality of gripping members defined therein |
— |
2000-03-14 |
| 6030137 |
Glass cleaning apparatus having a fabric cleaning surface |
— |
2000-02-29 |
| 6019854 |
Thumbless snow removal and cleaning paddle |
— |
2000-02-01 |
| 5900068 |
Cleaning or applicator device |
— |
1999-05-04 |
| 5758983 |
Ergonomically correct and ergonomically efficient hand-held scraper and ice removal device for window glass cleaning system |
— |
1998-06-02 |
| 4798599 |
Eye washing method and apparatus |
— |
1989-01-17 |
| 4196243 |
Non-skid floor covering |
Peter R. Sachs |
1980-04-01 |
