Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340992 | Detection and location of anomalous plasma events in fabrication chambers | Niraj Rana, Noah Elliot Baker | 2025-06-24 |
| 12322582 | Anomalous plasma event detection and mitigation in semiconductor processing | Sunil Kapoor, Karl Leeser, Noah Elliot Baker, Liang Meng | 2025-06-03 |
| 11823928 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, George Thomas | 2023-11-21 |
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2022-09-13 |
| 11393729 | Systems and methods for controlling plasma instability in semiconductor fabrication | Edward Augustyniak, Douglas Keil | 2022-07-19 |
| 11183406 | Control of wafer bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, George Thomas | 2021-11-23 |
| 10622243 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2020-04-14 |
| 10553465 | Control of water bow in multiple stations | Edward Augustyniak, David French, Sunil Kapoor, George Thomas | 2020-02-04 |
| 10510625 | Systems and methods for controlling plasma instability in semiconductor fabrication | Edward Augustyniak, Douglas Keil | 2019-12-17 |
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Bin Luo, Douglas Keil, Pramod Subramonium, Chunhai Ji +1 more | 2019-11-12 |
| 10378107 | Low volume showerhead with faceplate holes for improved flow uniformity | Ramesh Chandrasekharan, Saangrut Sangplung, Shankar Swaminathan, Frank L. Pasquale, Hu Kang +6 more | 2019-08-13 |
| 10301718 | Asymmetric pedestal/carrier ring arrangement for edge impedance modulation | Ryan Blaquiere, Ramesh Chandrasekharan, Shankar Swaminathan | 2019-05-28 |
| 10128160 | Systems and methods for detection of plasma instability by electrical measurement | Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2018-11-13 |
| 10121708 | Systems and methods for detection of plasma instability by optical diagnosis | Edward Augustyniak, Douglas Keil | 2018-11-06 |
| 9997422 | Systems and methods for frequency modulation of radiofrequency power supply for controlling plasma instability | Ishtak Karim, Yaswanth Rangineni, Edward Augustyniak, Douglas Keil, Ramesh Chandrasekharan +2 more | 2018-06-12 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Edward Augustyniak +2 more | 2018-04-10 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2018-01-23 |
| 9824941 | Systems and methods for detection of plasma instability by electrical measurement | Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Ramesh Chandrasekharan, Edward Augustyniak +1 more | 2017-11-21 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak, Sunil Kapoor | 2017-09-05 |
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Edward Augustyniak +2 more | 2017-05-09 |
| 9508547 | Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors | Frank L. Pasquale, Chloe Baldasseroni, Edward Augustyniak, Shankar Swaminathan | 2016-11-29 |