Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Douglas Keil, Pramod Subramonium +1 more | 2019-11-12 |
| 10192759 | Image reversal with AHM gap fill for multiple patterning | Nader Shamma, Bart J. van Schravendijk, Sirish Reddy | 2019-01-29 |
| 9941113 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama +2 more | 2018-04-10 |
| 9644271 | Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication | Douglas Keil, Ishtak Karim, Yaswanth Rangineni, Adrien LaVoie, Yukinori Sakiyama +2 more | 2017-05-09 |
| 9589799 | High selectivity and low stress carbon hardmask by pulsed low frequency RF power | Sirish Reddy, Xinyi Chen, Pramod Subramonium | 2017-03-07 |
| 9362133 | Method for forming a mask by etching conformal film on patterned ashable hardmask | Nader Shamma, Bart J. van Schravendijk, Sirish Reddy | 2016-06-07 |
| 9023731 | Carbon deposition-etch-ash gap fill process | Sirish Reddy, Tuo Wang, Mandyam Sriram | 2015-05-05 |