Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622962 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2020-04-14 |
| 10553465 | Control of water bow in multiple stations | Edward Augustyniak, David French, Yukinori Sakiyama, George Thomas | 2020-02-04 |
| 10373805 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2019-08-06 |
| 10304663 | RF generator for generating a modulated frequency or an inter-modulated frequency | Thomas Frederick | 2019-05-28 |
| 10187032 | Combiner and distributor for adjusting impedances or power across multiple plasma processing stations | George Thomas, Yaswanth Rangineni, Edward Augustyniak | 2019-01-22 |
| 10145010 | Multi-station plasma reactor with RF balancing | Karl Leeser, Adrien LaVoie, Yaswanth Rangineni | 2018-12-04 |
| 10043690 | Fault detection using showerhead voltage variation | Yaswanth Rangineni, Aaron Bingham, Tuan Nguyen | 2018-08-07 |
| 10044338 | Mutually induced filters | Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni, Karl Leeser | 2018-08-07 |
| 10043636 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Karl Leeser, Vince Burkhart | 2018-08-07 |
| 9954508 | Multiple-output radiofrequency matching module and associated methods | Karl Leeser, Bradford J. Lyndaker | 2018-04-24 |
| 9875883 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak | 2018-01-23 |
| 9840776 | Multi-station plasma reactor with RF balancing | Karl Leeser, Adrien LaVoie, Yaswanth Rangineni | 2017-12-12 |
| 9754769 | Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching | Yukinori Sakiyama, Yaswanth Rangineni, Jeremy Tucker, Douglas Keil, Edward Augustyniak | 2017-09-05 |
| 9263350 | Multi-station plasma reactor with RF balancing | Karl Leeser, Adrien LaVoie, Yaswanth Rangineni | 2016-02-16 |
| 9067075 | Apparatus and methods for detecting migration of neurostimulation leads | Kerry Bradley | 2015-06-30 |
| 8972023 | Apparatus and methods for detecting position and migration of neurostimulation leads | Kerry Bradley | 2015-03-03 |
| 8718757 | Apparatus and methods for detecting migration of neurostimulation leads | Kerry Bradley | 2014-05-06 |
| 8401665 | Apparatus and methods for detecting position and migration of neurostimulation leads | Kerry Bradley | 2013-03-19 |
| 8282983 | Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source | Edward Augustyniak | 2012-10-09 |
| 8131357 | Apparatus and methods for detecting migration of neurostimulation leads | Kerry Bradley | 2012-03-06 |
| 7395091 | Systems and methods for receiver upgrade | Ashok Burton Tripathi, Gregory L. Hey-Shipton, Gena Marie Yates, Edward R. Soares | 2008-07-01 |