Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Paul Gordon Robertson, Eric A. Pape +1 more | 2020-09-08 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Paul Gordon Robertson, Eric A. Pape +1 more | 2018-08-14 |
| 8742666 | Radio frequency (RF) power filters and plasma processing systems including RF power filters | Maolin Long, Fred Dennis Egley, Thomas W. Anderson, Seyed Jafar Jafarian-Tehrani, Michael Giarratano | 2014-06-03 |
| 8315029 | ESC high voltage control and methods thereof | Seyed Jafar Jafarian-Tehrani | 2012-11-20 |
| 7983018 | Plasma processing system ESC high voltage control and methods thereof | Seyed Jafar Jafarian-Tehrani | 2011-07-19 |
| 7768766 | Plasma processing system ESC high voltage control | Seyed Jafar Jafarian-Tehrani | 2010-08-03 |