Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901944 | Power and data transmission to substrate support in plasma chambers via optical fiber | Changyou Jing | 2024-02-13 |
| 10509425 | Virtual metrology method for ESC temperature estimation using thermal control elements | Tao Zhang, Jorge Jose Zaninovich | 2019-12-17 |
| 10306776 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Eric A. Pape, Changyou Jing | 2019-05-28 |
| 10119867 | Multichannel thermocouple compensation for three dimensional temperature gradient | John Distinti, Peter Norton, Andrea Wang | 2018-11-06 |
| 9279731 | Multichannel thermocouple compensation for three dimensional temperature gradient | John Distinti, Peter Norton, Andrea Wang | 2016-03-08 |
| 8992722 | Direct drive arrangement to control confinement rings positioning and methods thereof | John Rasnick | 2015-03-31 |
| 8859432 | Bare aluminum baffles for resist stripping chambers | Michael Kang, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2014-10-14 |
| 8854451 | Automated bubble detection apparatus and method | Josh Cormier, Fangli Hao, Hong Shih, Tuochuan Huang, John Daugherty +1 more | 2014-10-07 |
| 8742666 | Radio frequency (RF) power filters and plasma processing systems including RF power filters | Maolin Long, Ralph Jan-Pin Lu, Thomas W. Anderson, Seyed Jafar Jafarian-Tehrani, Michael Giarratano | 2014-06-03 |
| 8584612 | UV lamp assembly of degas chamber having rotary shutters | William Hart | 2013-11-19 |
| 8313635 | Bare aluminum baffles for resist stripping chambers | Michael Kang, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2012-11-20 |
| 7811409 | Bare aluminum baffles for resist stripping chambers | Michael Kang, Anthony Chen, Jack Kuo, Hong Shih, Duane Outka +1 more | 2010-10-12 |