Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522377 | System and method for substrate support feed-forward temperature control based on RF power | Tao Zhang, Siyuan Tian, Eric A. Pape | 2019-12-31 |
| 10509425 | Virtual metrology method for ESC temperature estimation using thermal control elements | Tao Zhang, Fred Dennis Egley | 2019-12-17 |
| 8277744 | Pinching channels for fractionation of fragmented samples | Josh Molho, Hui Xu | 2012-10-02 |
| 8202486 | Pinching channels for fractionation of fragmented samples | Josh Molho, Hui Xu | 2012-06-19 |