Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805963 | Electrostatic chuck with thermal choke | Maolin Long, Alex Paterson, Ying Wu | 2017-10-31 |
| 9412555 | Lower electrode assembly of plasma processing chamber | Jason Augustino, Keith Gaff, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh | 2016-08-09 |