Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508913 | Gas distribution apparatus for semiconductor processing | Robert Knop | 2003-01-21 |
| 6441555 | Plasma excitation coil | Arthur M. Howald, Frank Y. Lin | 2002-08-27 |
| 6333272 | Gas distribution apparatus for semiconductor processing | Robert Knop | 2001-12-25 |
| 6270862 | Method for high density plasma chemical vapor deposition of dielectric films | Huong Nguyen, Michael Barnes, Butch Berney | 2001-08-07 |
| 6203657 | Inductively coupled plasma downstream strip module | Wenli Collison, Michael Barnes, Tuqiang Ni, Butch Berney, Wayne Vereb | 2001-03-20 |
| 6184158 | Inductively coupled plasma CVD | Paul Shufflebotham, Alex Demos, Huong Nguyen, Butch Berney, Monique Ben-Dor | 2001-02-06 |
| 6142163 | Method and apparatus for pressure control in vacuum processors | Farro Kaveh, Michael Barnes | 2000-11-07 |
| 6042687 | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing | Vikram Singh, Tom Ni, Michael Barnes, Richard Yang | 2000-03-28 |
| 6013155 | Gas injection system for plasma processing | Huong Nguyen, Michael Barnes, Tom Ni | 2000-01-11 |
| 5835334 | Variable high temperature chuck for high density plasma chemical vapor deposition | Michael Barnes, Butch Berney, Huong Nguyen | 1998-11-10 |