Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6042687 | Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing | Vikram Singh, Brian McMillin, Tom Ni, Michael Barnes | 2000-03-28 |
| 5827437 | Multi-step metallization etch | Kenlin Huang | 1998-10-27 |