Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan +5 more | 2013-10-01 |
| 7052553 | Wet cleaning of electrostatic chucks | Hong Shih, Tuochuan Huang, Catherine Zhou, Bruno Morel, Brian McMillin +1 more | 2006-05-30 |
| 5670062 | Method for producing tapered lines | Cheng-yih Lin | 1997-09-23 |