Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153388 | Chamber for high-pressure wafer processing and method for making the same | — | 2006-12-26 |
| 7089687 | Wafer edge wheel with drying function | — | 2006-08-15 |
| 6841006 | Atmospheric substrate processing apparatus for depositing multiple layers on a substrate | Michael Barnes, Michael S. Cox, Canfeng Lai | 2005-01-11 |
| 6712020 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane +2 more | 2004-03-30 |
| 6418874 | Toroidal plasma source for plasma processing | Michael S. Cox, Canfeng Lai, Robert B. Majewski, David Wanamaker, Christopher T. Lane +2 more | 2002-07-16 |
| 6176198 | Apparatus and method for depositing low K dielectric materials | Yeh-Jen Kao, Fong Chang, Robert B. Majewski, David Wanamaker, Yen-Kun Wang | 2001-01-23 |