Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559483 | Platform architecture to improve system productivity | Richard H. Gould, Candi Kristoffersen, Gustavo G. Francken, Benjamin W. Mooring | 2020-02-11 |
| 7407565 | Method and apparatus for ionized plasma deposition | Wei Wang | 2008-08-05 |
| 7097744 | Method and apparatus for controlling darkspace gap in a chamber | Alan Liu, Marc Schweitzer, Michael Rosenstein, Jennifer Watia, Xinyu Zhang +3 more | 2006-08-29 |
| 6627056 | Method and apparatus for ionized plasma deposition | Wei Wang | 2003-09-30 |
| 6579426 | Use of variable impedance to control coil sputter distribution | John C. Forster | 2003-06-17 |
| 6228236 | Sputter magnetron having two rotation diameters | Michael Rosenstein, Jianming Fu, Leif DeLaurentis, Alan Liu | 2001-05-08 |
| 6228235 | Magnetron for low pressure, full face erosion | Avi Tepman | 2001-05-08 |
| 6193811 | Method for improved chamber bake-out and cool-down | Arvind Sundarrajan, Dinesh Saigal, Peijun Ding | 2001-02-27 |
| 6059945 | Sputter target for eliminating redeposition on the target sidewall | Jianming Fu | 2000-05-09 |
| 6023038 | Resistive heating of powered coil to reduce transient heating/start up effects multiple loadlock system | — | 2000-02-08 |
| 5922133 | Multiple edge deposition exclusion rings | Avi Tepman | 1999-07-13 |
| 5914018 | Sputter target for eliminating redeposition on the target sidewall | Jianming Fu | 1999-06-22 |
| 5658442 | Target and dark space shield for a physical vapor deposition system | Fernand Dorleans, Christopher Hagerty, Mark Cassidy Cridlin Lloyd, Howard H. Tang, Siyaun Yang +1 more | 1997-08-19 |
| 5650052 | Variable cell size collimator | Sergio Edelstein, Nitin Khurana, Keiji Miyamoto, Roderick C. Mosely, William J. Murphy +2 more | 1997-07-22 |
| 5516403 | Reversing orientation of sputtering screen to avoid contamination | John C. Forster, Avi Tepman | 1996-05-14 |