Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7993470 | Fabricating and cleaning chamber components having textured surfaces | Brian T. West, Marc Schweitzer | 2011-08-09 |
| 7097744 | Method and apparatus for controlling darkspace gap in a chamber | Alan Liu, Marc Schweitzer, James Van Gogh, Michael Rosenstein, Xinyu Zhang +3 more | 2006-08-29 |
| 6933508 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Marc Schweitzer, Alan Liu | 2005-08-23 |
| 6812471 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Marc Schweitzer, Alan Liu, Brian T. West +1 more | 2004-11-02 |