Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981307 | Method and apparatus for shaping gas profile near bevel edge | Jack Chen, Andrew D. Bailey, III | 2011-07-19 |
| 7881886 | Methods for performing transient flow prediction and verification using discharge coefficients | James V. Tietz, Vernon Wong, Richard J. Meinecke | 2011-02-01 |
| 7822570 | Methods for performing actual flow verification | James V. Tietz, Vernon Wong, Richard J. Meinecke | 2010-10-26 |
| 7731798 | Heated chuck for laser thermal processing | Igor Landau, David A. Markle, Somit Talwar, Michael O. Thompson, Ivelin Angelov +1 more | 2010-06-08 |
| 7326877 | Laser thermal processing chuck with a thermal compensating heater module | Igor Landau, David A. Markle, Somit Talwar, Michael O. Thompson, Ivelin Angelov +1 more | 2008-02-05 |
| 7176405 | Heat shield for thermal processing | Boris Grek, Michael O. Thompson | 2007-02-13 |
| 6778762 | Sloped chamber top for substrate processing | Erez Shmuel, Syed S. Basha, Suwipin Martono | 2004-08-17 |
| 6114227 | Chamber for reducing contamination during chemical vapor deposition | David Leksell, Ming Xi Chan, Joseph P. Ellul, Jeanne Luce, David Thomas Ryan +3 more | 2000-09-05 |
| 6079353 | Chamber for reducing contamination during chemical vapor deposition | David Leksell, Ming Xi Chan, Joseph P. Ellul, Jeanne Luce, David Thomas Ryan +2 more | 2000-06-27 |