Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401278 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2016-07-26 |
| 8746975 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Giovanni Bianucci, Fabio Zocchi, Robert Banham, Marco Pedrali, Natale M. Ceglio +5 more | 2014-06-10 |
| 8742286 | Apparatus and method for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2014-06-03 |
| 8731139 | Evaporative thermal management of grazing incidence collectors for EUV lithography | Daniel Stearns, Natale M. Ceglio | 2014-05-20 |
| 8314360 | Apparatuses and methods for irradiating a substrate to avoid substrate edge damage | David A. Markle | 2012-11-20 |
| 8153930 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2012-04-10 |
| 7879741 | Laser thermal annealing of lightly doped silicon substrates | Somit Talwar, Michael O. Thompson, David A. Markle | 2011-02-01 |
| 7840104 | Ultra-wide band AWG multiplexer | Saurav Das, Wenhua Lin | 2010-11-23 |
| 7744274 | Methods and apparatus for temperature measurement and control on a remote substrate surface | Michael Weitzel, David A. Markle | 2010-06-29 |
| 7639908 | Broadcasting arrayed waveguide | Saurav Das, Jacob Sun | 2009-12-29 |
| 7514305 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, David A. Markle | 2009-04-07 |
| 7440655 | Duplex arrayed waveguide grating | Saurav Das | 2008-10-21 |
| 7403284 | Integrated optics based high-resolution spectrophotometer | Saurav Das | 2008-07-22 |
| 7292616 | CO2 laser stabilization systems and methods | Michael Weitzel, Igor Landau | 2007-11-06 |
| 7238915 | Methods and apparatus for irradiating a substrate to avoid substrate edge damage | David A. Markle | 2007-07-03 |
| 7176405 | Heat shield for thermal processing | Iqbal Shareef, Michael O. Thompson | 2007-02-13 |
| 7148159 | Laser thermal annealing of lightly doped silicon substrates | Somit Talwar, Michael O. Thompson, David A. Markle | 2006-12-12 |
| 6507405 | Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt | Raymond Ellis | 2003-01-14 |
| 6347176 | Acousto-optical light tunnel apparatus and method | Andrew M. Hawryluk, David G. Stites | 2002-02-12 |
| 6097488 | Method and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered light | Joseph M. Bartolick, Alan D. Kennedy | 2000-08-01 |