Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9057962 | Source-collector module with GIC mirror and LPP EUV light source | Natale M. Ceglio, Giovanni Nocerino | 2015-06-16 |
| 8895946 | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source | Natale M. Ceglio, Daniel Stearns, Jacques Kools, Giuseppe Valsecchi, Riccardo Binda | 2014-11-25 |
| 8746975 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Giovanni Bianucci, Robert Banham, Marco Pedrali, Boris Grek, Natale M. Ceglio +5 more | 2014-06-10 |
| 8686381 | Source-collector module with GIC mirror and tin vapor LPP target system | Richard Levesque, Natale M. Ceglio, Giovanni Nocerino | 2014-04-01 |
| 8594277 | Grazing incidence collector optical systems for EUV and X-ray applications | Pietro Binda, Enrico Benedetti | 2013-11-26 |
| 8411815 | Grazing incidence collector for laser produced plasma sources | Ian Wallhead | 2013-04-02 |
| 8390785 | Collector optical system | Pietro Binda, Enrico Benedetti | 2013-03-05 |
| 8344339 | Source-collector module with GIC mirror and tin rod EUV LPP target system | Richard Levesque, Natale M. Ceglio, Giovanni Nocerino | 2013-01-01 |
| 8330131 | Source-collector module with GIC mirror and LPP EUV light source | Natale M. Ceglio, Giovanni Nocerino | 2012-12-11 |
| 8258485 | Source-collector module with GIC mirror and xenon liquid EUV LPP target system | Richard Levesque, Natale M. Ceglio, Giovanni Nocerino | 2012-09-04 |
| 8050380 | Zone-optimized mirrors and optical systems using same | Jacques Kools | 2011-11-01 |