Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9057962 | Source-collector module with GIC mirror and LPP EUV light source | Natale M. Ceglio, Fabio Zocchi | 2015-06-16 |
| 8686381 | Source-collector module with GIC mirror and tin vapor LPP target system | Richard Levesque, Natale M. Ceglio, Fabio Zocchi | 2014-04-01 |
| 8344339 | Source-collector module with GIC mirror and tin rod EUV LPP target system | Richard Levesque, Natale M. Ceglio, Fabio Zocchi | 2013-01-01 |
| 8330131 | Source-collector module with GIC mirror and LPP EUV light source | Natale M. Ceglio, Fabio Zocchi | 2012-12-11 |
| 8258485 | Source-collector module with GIC mirror and xenon liquid EUV LPP target system | Richard Levesque, Natale M. Ceglio, Fabio Zocchi | 2012-09-04 |