Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8895946 | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source | Natale M. Ceglio, Daniel Stearns, Jacques Kools, Giuseppe Valsecchi, Fabio Zocchi | 2014-11-25 |