Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8746975 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Giovanni Bianucci, Fabio Zocchi, Robert Banham, Boris Grek, Natale M. Ceglio +5 more | 2014-06-10 |
| 8153994 | Cooling systems and methods for grazing incidence EUV lightography collectors | Riccardo Ghislanzoni | 2012-04-10 |