Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8746975 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Fabio Zocchi, Robert Banham, Marco Pedrali, Boris Grek, Natale M. Ceglio +5 more | 2014-06-10 |
| 8643823 | Stress-decoupling devices and methods for cooled mirror systems | Stefano Moretti, Gordon Yue, Gian Luca Cassol | 2014-02-04 |