Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8276866 | Adjustable clips for grazing-incidence collectors | Giorgio Pirovano, Jacques Kools | 2012-10-02 |
| 8153994 | Cooling systems and methods for grazing incidence EUV lightography collectors | Marco Pedrali | 2012-04-10 |