Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6778762 | Sloped chamber top for substrate processing | Iqbal Shareef, Erez Shmuel, Suwipin Martono | 2004-08-17 |
| 6333268 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Shmuel Erez, Arkadiy Shimanovich, Ravi Vellanki, Krishnan Shrinivasan +2 more | 2001-12-25 |
| 6228563 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Krishnan Shrinivasan, Karen A. Reinhardt, Aleksandr Kabansky | 2001-05-08 |
| 6190103 | Wafer transfer device and method | Shmuel Erez, Art Hajjarian | 2001-02-20 |