Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6333268 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Shmuel Erez, Syed S. Basha, Arkadiy Shimanovich, Ravi Vellanki +2 more | 2001-12-25 |
| 6228563 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Syed S. Basha, Krishnan Shrinivasan, Karen A. Reinhardt | 2001-05-08 |