Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6333268 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Shmuel Erez, Syed S. Basha, Arkadiy Shimanovich, Krishnan Shrinivasan +2 more | 2001-12-25 |