Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105061 | Method and apparatus for sealing substrate load port in a high pressure reactor | Krishnan Shrinivasan, Vladimir Starov | 2006-09-12 |
| 6563092 | Measurement of substrate temperature in a process chamber using non-contact filtered infrared pyrometry | Krishnan Shrinivasan, Prasad N. Gadgil | 2003-05-13 |
| 6333268 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Shmuel Erez, Syed S. Basha, Ravi Vellanki, Krishnan Shrinivasan +2 more | 2001-12-25 |