Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9214583 | Method to build transparent polarizing solar cell | Hirak Mitra | 2015-12-15 |
| 7503334 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Souvik Banerjee, Francisco Juarez, Sanjay Gopinath | 2009-03-17 |
| 6848458 | Apparatus and methods for processing semiconductor substrates using supercritical fluids | Krishnan Shrinivasan, Souvik Banerjee, Francisco Juarez, Sanjay Gopinath | 2005-02-01 |
| 6747243 | Spot cleaning of particles after inspection | — | 2004-06-08 |
| 6333268 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Shmuel Erez, Syed S. Basha, Arkadiy Shimanovich, Ravi Vellanki +2 more | 2001-12-25 |
| 6228563 | Method and apparatus for removing post-etch residues and other adherent matrices | Vladimir Starov, Syed S. Basha, Krishnan Shrinivasan, Aleksandr Kabansky | 2001-05-08 |
| 5441599 | Lightly doped drain etch method for semiconductor manufacture | — | 1995-08-15 |
| 5290399 | Surface planarizing methods for integrated circuit devices | — | 1994-03-01 |
| 4676867 | Planarization process for double metal MOS using spin-on glass as a sacrificial layer | Patricia C. Elkins, Yau Wai Howard Chan, Keh-Fei C. Chi, Rebecca Yicksin Tang, Robert L. Zwingman | 1987-06-30 |