Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9364870 | Ultrasonic cleaning method and apparatus therefore | Evangelos Spyropoulos, Iqbal Shareef | 2016-06-14 |
| 9174249 | Ultrasonic cleaning method and apparatus therefore | Evangelos Spyropoulos, Iqbal Shareef | 2015-11-03 |
| 9054148 | Method for performing hot water seal on electrostatic chuck | Hong Shih, Tuochuan Huang, David Schaefer, Ambarish Chhatre, John Daugherty +1 more | 2015-06-09 |