Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614149 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Zhisong Huang, Robert Charatan +1 more | 2013-12-24 |
| 8491750 | Adjustable confinement ring assembly | — | 2013-07-23 |
| 8268118 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Zhisong Huang, Robert Charatan +1 more | 2012-09-18 |
| 8080168 | Confinement ring drive | — | 2011-12-20 |
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Sangheon Lee, Dongho Heo, Daehan Choi, S. M. Reza Sadjadi | 2011-03-22 |
| 7772122 | Sidewall forming processes | Helen Zhu, Ji Soo Kim, S. M. Reza Sadjadi | 2010-08-10 |
| 7695632 | Critical dimension reduction and roughness control | Sangheon Lee, Dae-Han Choi, Jisoo Kim, Zhisong Huang, Robert Charatan +1 more | 2010-04-13 |
| 7682516 | Vertical profile fixing | S. M. Reza Sadjadi, Jisoo Kim, Zhisong Huang, Eric A. Hudson | 2010-03-23 |
| 7491647 | Etch with striation control | S. M. Reza Sadjadi, Ji Soo Kim, Zhisong Huang, Eric A. Hudson | 2009-02-17 |
| 7396769 | Method for stripping photoresist from etched wafer | Eric A. Hudson | 2008-07-08 |
| 7364623 | Confinement ring drive | — | 2008-04-29 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Sangheon Lee, Thomas S. Choi, Peter Loewenhardt +4 more | 2007-11-13 |
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more | 2005-06-21 |
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more | 2004-09-21 |
| 6780569 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Eric A. Hudson, Reza Sadjadi, Daxing Ren, Wan-Lin Chen, Douglas Keil | 2004-08-24 |